HiPaceTM MC
Magnetically Levitated Turbopumps with Integrated Drive Electronics.
HiPace MC is a line of magnetically levitated turbopumps with integrated drive electronics that operate at the maximum performance level. This not only applies with respect to their especially high pumping speeds, high compression and high gas throughput. Their magnetically levitated bearings, which assure extremely low vibration and maintenance-free operation, are the embodiment of top class technology.
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Integrated drive electronics eliminate the need for cumbersome
and costly cabling -
Suitable for most applications thanks to high pumping speed
and high gas throughput -
Extremely low vibration and noise for sensitive applications
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Highly reliable thanks to permanent rotor monitoring
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Robust, long-life safety bearing concept
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Water cooling affords long service life of electronic components
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Patented centering ring with anti-slip coating to enhance system reliability
- 5-axis active magnetic bearing
- Any desired installation orientation
- Profibus and DeviceNet interfaces (optional)
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Semi S2, F47 and E74 certification
Applications
Semiconductor Industry
- EUV lithography
- Chemical vapor deposition (CVD)
- Physical vapor deposition (PVD)
- Ion beam etching
- Ion implantation
Research & Development
- Physical equipment
- Space simulation
Coating
- Glass coating
- Thin films
- Ophthalmics
- Solar cell coating
Industrial
- Metallurgy
- Electron beam welding