OnToolTM Booster
The new High-Vacuum Pump that Works Against Atmosphere!
With its performance and compact design, the OnTool Booster is setting standards in vacuum technology.
It is characterized by an extremely high pumping speed of 130 m3/h and an ultimate pressure of < 1 · 10-5 mbar. The OnTool Booster is the perfect solution for clean applications in coating, the semiconductor industry or research and development – without any particles, corrosive gases or condensation. It can be employed in a wide variety of applications, either as a stand-alone pump or as a backing pump for turbopumps.
With its performance and compact design, the OnTool Booster is setting standards in vacuum technology.
It is characterized by an extremely high pumping speed of 130 m3/h and an ultimate pressure of < 1 · 10-5 mbar. The OnTool Booster is the perfect solution for clean applications in coating, the semiconductor industry or research and development – without any particles, corrosive gases or condensation. It can be employed in a wide variety of applications, either as a stand-alone pump or as a backing pump for turbopumps.
Advantages at a glance
- Innovative → High-vacuum directly against atmosphere
- Cost-effective → No backing pump required
- Compact → Can be connected directly to the tool
- Particle-free → For all clean applications
- Variable → Can be used as either a stand-alone or backing pump
- Short cycle times → Optimized for a low transfer pressure
- Powerful → Extremely high pumping speed of 130 m3/h
- Flexible → High-vacuum flange in 3 positions
Applications
- Transfer chambers
- Load-lock chambers
- EUV lithography
- Solar cell coating
- Optical coating
- Surface finishing
- Simulation chambers