Turbopumps

Turbopumps for all High and Ultra-High Vacuum Applications.
 

Turbopumps generate vacuums in the high to ultra-high vacuum range of up to 10-11 mbar.
 
Applications  
In the production of many products of everyday life and in many areas of engineering research, vacuum technology plays a decisive role. Here the turbopump is of decisive importance in providing extremely pure process conditions.
 
Examples for applications can be found in many different areas:
 
  • Analytics
    (mass spectrometry, electron microscopy, and many more)
  • Semiconductor industry
    (electronic components, integrated circuits (ICs), solar cells and many more)
  • Optical/glass industry
    (heat protection, anti-reflection, reflection, optical filter coatings and many more)
  • Coating technology
    (surface protection, decorative coatings, displays, screens and many more)
  • Vacuum metallurgy
    (vacuum soldering, vacuum sintering, vacuum alloys, vacuum furnaces and many more)
  • Leak detection
    (vacuum systems, vehicle fuel tanks, airbag cartridges, packages)
  • Research facilities
    (nuclear particle physics, fusion research, Laser applications and many more)
  • Lamp industry
    (lamp production and many more)

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