1.3.1 Contamination

Vacuum chambers must be clean in order to reach the desired pressure as quickly as possible when they are pumped down. Typical contaminants include oil and grease on screws and seals, process reaction products or condensed vapors, particularly water that is adsorbed on the walls of the vessel. Consequently, it is necessary to ensure that the components are clean when installing vacuum equipment. All components attached in the vacuum chamber must be clean and grease-free. All seals must also be installed dry. If high or ultra high vacuum is to be generated, clean gloves must be worn during the assembly process.